EC709 Fabrication Technology and VLSI Integration
Course Name:
EC709 Fabrication Technology and VLSI Integration
Programme:
M.Tech (VLSI)
Semester:
Second
Category:
Programme Core (PC)
Credits (L-T-P):
(3-0-2) 4
Content:
Fundamentals of VLSI Environment and Crystal Growth Techniques, Dielectric, Polysilicon Deposition and Doping Technique, Lithography, Etching, and Metallization, Process Integration and Advanced VLSI Technologies.
References:
C.Y. Chang and S.M.Sze, ULSI Technology, McGraw Hill, 1996.
S.K. Ghandhi, VLSI Fabrication Principles, John Wiley Inc., 1983.
S.M. Sze, VLSI Technology, McGraw Hill, 1988.
M. K. Achuthan and K. N. Bhat, Fundamentals of Semiconductor Devices McGraw Hill, 2006
Department:
Electronics and Communication Engineering(ECE)